Diamond Synthesis on Silicon Nitride by the Hot Filament Chemical Vapor Deposition Technique
نویسندگان
چکیده
منابع مشابه
Computer Simulation of Temperature Parameter for Diamond Formation by Using Hot-Filament Chemical Vapor Deposition
To optimize the deposition parameters of diamond films, the temperature, pressure, and distance between the filament and the susceptor need to be considered. However, it is difficult to precisely measure and predict the filament and susceptor temperature in relation to the applied power in a hot filament chemical vapor deposition (HF-CVD) system. In this study, the temperature distribution insi...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1998
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.106.1167